Xenon hexafluoride (XeF₆) is prepared by heating a mixture of xenon and fluorine in the ratio 1 : 20 at 473—523K under a pressure of 50 atmospheres.

Structure : XeF₆ has pentagonal bipyramid geometry due to sp³d³ hybridization. One trans position is occupied by a lone pair giving a distorted octahedral shape.

Properties: It is colourless, crystalline soild, highly soluble in anhydrous HF giving solution whic is a good conductor of electricity, HF + XeF₆ —> XeF₅⁺ + HF₂^–

It is the most powerful fluorinating agent and reacts with H₂ to give Xe and HF. Partial hydrolysis of XeF₆ yields XeOF₄ an complete hydrolysis yields xenon trioxide, XeO₃.

XeH₆ + H₂O —> XeOF₄ + 2HF + 3H₂O —> XeO₃ + 6HF

It forms addition compounds with alkali metal fluorides (except LiF) of the formula XeF₆. MF where M represents the alkali metal.